JPS6342526Y2 - - Google Patents

Info

Publication number
JPS6342526Y2
JPS6342526Y2 JP1983144386U JP14438683U JPS6342526Y2 JP S6342526 Y2 JPS6342526 Y2 JP S6342526Y2 JP 1983144386 U JP1983144386 U JP 1983144386U JP 14438683 U JP14438683 U JP 14438683U JP S6342526 Y2 JPS6342526 Y2 JP S6342526Y2
Authority
JP
Japan
Prior art keywords
substrate
resist
suction port
peripheral edge
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983144386U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6052621U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14438683U priority Critical patent/JPS6052621U/ja
Publication of JPS6052621U publication Critical patent/JPS6052621U/ja
Application granted granted Critical
Publication of JPS6342526Y2 publication Critical patent/JPS6342526Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP14438683U 1983-09-16 1983-09-16 レジスト塗布装置 Granted JPS6052621U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14438683U JPS6052621U (ja) 1983-09-16 1983-09-16 レジスト塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14438683U JPS6052621U (ja) 1983-09-16 1983-09-16 レジスト塗布装置

Publications (2)

Publication Number Publication Date
JPS6052621U JPS6052621U (ja) 1985-04-13
JPS6342526Y2 true JPS6342526Y2 (en]) 1988-11-08

Family

ID=30321997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14438683U Granted JPS6052621U (ja) 1983-09-16 1983-09-16 レジスト塗布装置

Country Status (1)

Country Link
JP (1) JPS6052621U (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6351638A (ja) * 1986-08-20 1988-03-04 Clean Saafueisu Gijutsu Kk フオト・エツチングのレジスト塗布回収装置
JP2548550B2 (ja) * 1986-10-31 1996-10-30 昭和電線電纜株式会社 ローラの塗布方法
JP2009158767A (ja) * 2007-12-27 2009-07-16 Tokyo Electron Ltd 回転塗布装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5881932U (ja) * 1981-11-26 1983-06-03 凸版印刷株式会社 スピンナ−塗布装置

Also Published As

Publication number Publication date
JPS6052621U (ja) 1985-04-13

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